Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
Crossref DOI link: https://doi.org/10.1063/1.4757907
Published Online: 2013-01-08
Published Print: 2013-01-14
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Miikkulainen, Ville
Leskelä, Markku
Ritala, Mikko
Puurunen, Riikka L.