Characterisation and optimisation of PECVD SiNx as an antireflection coating and passivation layer for silicon solar cells
Crossref DOI link: https://doi.org/10.1063/1.4795108
Published Online: 2013-03-05
Published Print: 2013-03-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Wan, Yimao
McIntosh, Keith R.
Thomson, Andrew F.