Ultra-thin free-standing single crystalline silicon membranes with strain control
Crossref DOI link: https://doi.org/10.1063/1.4807130
Published Online: 2013-05-17
Published Print: 2013-05-13
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Shchepetov, A.
Prunnila, M.
Alzina, F.
Schneider, L.
Cuffe, J.
Jiang, H.
Kauppinen, E. I.
Sotomayor Torres, C. M.
Ahopelto, J.