Reactive molecular dynamic simulations of early stage of wet oxidation of Si (001) surface
Crossref DOI link: https://doi.org/10.1063/1.4818941
Published Online: 2013-08-19
Published Print: 2013-08-21
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Pamungkas, Mauludi Ariesto
Kim, Byung-Hyun
Lee, Kwang-Ryeol