The effect of water uptake on the mechanical properties of low-k organosilicate glass
Crossref DOI link: https://doi.org/10.1063/1.4817917
Published Online: 2013-08-23
Published Print: 2013-08-28
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Guo, X.
Jakes, J. E.
Nichols, M. T.
Banna, S.
Nishi, Y.
Shohet, J. L.