The role of plasma evolution and photon transport in optimizing future advanced lithography sources
Crossref DOI link: https://doi.org/10.1063/1.4819439
Published Online: 2013-08-28
Published Print: 2013-08-28
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Sizyuk, Tatyana
Hassanein, Ahmed