Fabrication of arbitrarily shaped silicon and silicon oxide nanostructures using tip-based nanofabrication
Crossref DOI link: https://doi.org/10.1116/1.4831767
Published Print: 2013-11
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Hu, Huan
Mohseni, Parsian K.
Pan, Lei
Li, Xiuling
Somnath, Suhas
Felts, Jonathan R.
Shannon, Mark A.
King, William P.