Control of plasma profile in microwave discharges via inverse-problem approach
Crossref DOI link: https://doi.org/10.1063/1.4840735
Published Online: 2013-12-09
Published Print: 2013-12-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Yasaka, Yasuyoshi
Tobita, Naoki
Tsuji, Akihiro