Influence of c-axis orientation and scandium concentration on infrared active modes of magnetron sputtered ScxAl1−xN thin films
Crossref DOI link: https://doi.org/10.1063/1.4850735
Published Online: 2013-12-16
Published Print: 2013-12-16
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Mayrhofer, P. M.
Eisenmenger-Sittner, C.
Euchner, H.
Bittner, A.
Schmid, U.