Nb-B-C thin films for electrical contact applications deposited by magnetron sputtering
Crossref DOI link: https://doi.org/10.1116/1.4875135
Published Online: 2014-05-21
Published Print: 2014-07-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Nedfors, Nils
Tengstrand, Olof
Eklund, Per
Hultman, Lars
Jansson, Ulf