Adaptive AFM scan speed control for high aspect ratio fast structure tracking
Crossref DOI link: https://doi.org/10.1063/1.4897141
Published Online: 2014-10-08
Published Print: 2014-10-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Ahmad, Ahmad
Schuh, Andreas
Rangelow, Ivo W.
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (SFB 622)