Electron energy distributions and electron impact source functions in Ar/N2 inductively coupled plasmas using pulsed power
Crossref DOI link: https://doi.org/10.1063/1.4904935
Published Online: 2015-01-22
Published Print: 2015-01-28
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Logue, Michael D. http://orcid.org/0000-0001-5819-8193
Kushner, Mark J.
Funding for this research was provided by:
National Science Foundation (CHE-1124724)
Semiconductor Research Corporation
Fusion Energy Sciences (DE-SC0001319)
Accepted Manuscript valid from 2016-01-22