Cheng, Chao-Lin
Tsai, Ming-Han
Fang, Weileun
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Determining the thermal expansion coefficient of thin films for a CMOS MEMS process using test cantilevers
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-11-05
Date accepted: 2014-11-24
Online publication date: 2015-01-22