Combinatorial thin film composition mapping using three dimensional deposition profiles
Crossref DOI link: https://doi.org/10.1063/1.4914466
Published Online: 2015-03-17
Published Print: 2015-03-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Suram, Santosh K.
Zhou, Lan
Becerra-Stasiewicz, Natalie
Kan, Kevin
Jones, Ryan J. R. http://orcid.org/0000-0002-4629-3115
Kendrick, Brian M.
Gregoire, John M.