Al capping layers for nondestructive x-ray photoelectron spectroscopy analyses of transition-metal nitride thin films
Crossref DOI link: https://doi.org/10.1116/1.4916239
Published Online: 2015-03-30
Published Print: 2015-09-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Greczynski, Grzegorz
Petrov, Ivan
Greene, J. E.
Hultman, Lars