Limitations to laser machining of silicon using femtosecond micro-Bessel beams in the infrared
Crossref DOI link: https://doi.org/10.1063/1.4918669
Published Online: 2015-04-20
Published Print: 2015-04-21
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Grojo, David
Mouskeftaras, Alexandros
Delaporte, Philippe
Lei, Shuting
Funding for this research was provided by:
CARNOT STAR Institute (Via LASER project)
French national research agency (2010-JCJC-913-01)