Zhang, Yiting http://orcid.org/0000-0001-7491-2895
Zafar, Abdullah
Coumou, David J. http://orcid.org/0000-0003-4468-9471
Shannon, Steven C.
Kushner, Mark J.
Funding for this research was provided by:
MKS Instruments
National Science Foundation (CHE-1124724, IIP-1362103)
Semiconductor Research Corporation
Lam Research Corporation
U.S. Department of Energy (DE-SC0001319)