Charging suppression in focused-ion beam fabrication of visible subwavelength dielectric grating reflector using electron conducting polymer
Crossref DOI link: https://doi.org/10.1116/1.4929152
Published Online: 2015-08-19
Published Print: 2015-11-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Alias, Mohd Sharizal
Liao, Hsien-Yu
Ng, Tien Khee
Ooi, Boon Siew
Funding for this research was provided by:
King Abdullah University of Science and Technology
King Abdulaziz City for Science and Technology