Grishina, D A
Harteveld, C A M
Woldering, L A
Vos, W L
Journal title: Nanotechnology
Article type: paper
Article title: Method for making a single-step etch mask for 3D monolithic nanostructures
Copyright information: © 2015 IOP Publishing Ltd
License information: cc-by Content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2015-06-17
Date accepted: 2015-09-29
Online publication date: 2015-11-17