Thickness-dependent growth orientation of F-doped ZnO films formed by atomic layer deposition
Crossref DOI link: https://doi.org/10.1116/1.4938180
Published Online: 2015-12-22
Published Print: 2016-01-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Kang, Kyung-Mun
Choi, Yong-June
Yeom, Geun Young
Park, Hyung-Ho