<i>In situ</i> collector cleaning and extreme ultraviolet reflectivity restoration by hydrogen plasma for extreme ultraviolet sources
Crossref DOI link: https://doi.org/10.1116/1.4942456
Published Online: 2016-02-23
Published Print: 2016-03-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Elg, Daniel T.
Sporre, John R.
Panici, Gianluca A.
Srivastava, Shailendra N.
Ruzic, David N.
Funding for this research was provided by:
Directorate for Engineering (1436081)
Accepted Manuscript valid from 2017-02-23