Direct characterization of hydrodynamic loading on a microelectromechanical systems microstructure
Crossref DOI link: https://doi.org/10.1063/1.4944412
Published Online: 2016-03-16
Published Print: 2016-03-14
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Mehrnezhad, Ali
Bashir, Rashid
Park, Kidong
Funding for this research was provided by:
Louisiana Board of Regents (LEQSF(2014-17)-A-05)