Investigation of geometric design in piezoelectric microelectromechanical systems diaphragms for ultrasonic energy harvesting
Crossref DOI link: https://doi.org/10.1063/1.4948973
Published Online: 2016-05-09
Published Print: 2016-05-09
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Shi, Qiongfeng
Wang, Tao
Kobayashi, Takeshi
Lee, Chengkuo
Funding for this research was provided by:
National Research Foundation Singapore (R-263-000-A27-281)