Substrate impact on the low-temperature growth of GaN thin films by plasma-assisted atomic layer deposition
Crossref DOI link: https://doi.org/10.1116/1.4953463
Published Online: 2016-06-13
Published Print: 2016-07-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Kizir, Seda
Haider, Ali
Biyikli, Necmi
Funding for this research was provided by:
TUBITAK, Turkey (112M004)
TUBITAK, Turkey (112M482)
TUBITAK, Turkey (214M015)