Luan, P
Knoll, A J
Wang, H
Kondeti, V S S K
Bruggeman, P J
Oehrlein, G S
Funding for this research was provided by:
Division of Physics (PHY-1415353)
U.S. Department of Energy (DE-SC0001939)
Journal title: Journal of Physics D: Applied Physics
Article type: lett
Article title: Model polymer etching and surface modification by a time modulated RF plasma jet: role of atomic oxygen and water vapor
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2016-09-02
Date accepted: 2016-11-18
Online publication date: 2016-12-13