Oxidation sharpening of silicon tips in the atmospheric environment
Crossref DOI link: https://doi.org/10.1116/1.4998561
Published Online: 2017-11-06
Published Print: 2017-11-01
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Dey, Ripon Kumar
Shen, Jiashi
Cui, Bo