Funding for this research was provided by:
Research Institute of Electrical Communication, Tohoku University (Cooperative Research Project Progra)
Ministry of Education, Culture, Sports, Science and Technology
Spin-RNJ
Japan Society for the Promotion of Science (Core-to-Core Program)
Journal title: Nanotechnology
Article type: lett
Article title: Fabrication of arrays of tapered silicon micro-/nano-pillars by metal-assisted chemical etching and anisotropic wet etching
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-03-23
Date accepted: 2018-04-26
Online publication date: 2018-05-11