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Fundamental scaling laws for the direct-write chemical vapor deposition of nanoscale features: modeling mass transport around a translating nanonozzle

Crossref DOI link: https://doi.org/10.1039/C8NR10366F

Published Online: 2019

Update policy: https://doi.org/10.1039/rsc_crossmark_policy

Authors

Drahushuk, Lee W.

Govind Rajan, Ananth https://orcid.org/0000-0003-2462-0506
Strano, Michael S.
Funding

Funding for this research was provided by:

Army Research Office (64655-CH-ISN)
License Information

Accepted Manuscript valid from 2020-01-28
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SIMILARITY CHECK

: This document is Similarity Check deposited

IDENTIFIERS

: Ananth Govind Rajan (ORCID)

PEER REVIEW METHOD

: Single-blind

PUBLICATION HISTORY

: Received 22 December 2018; Accepted 19 January 2019; Advance Article published 28 January 2019; Version of Record published 7 February 2019

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