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Atomic layer deposition of chalcogenides for next-generation phase change memory

Published Online: 2021

Authors

Lee, Yoon Kyeung

Yoo, Chanyoung

Kim, Woohyun https://orcid.org/0000-0001-7578-4813
Jeon, Jeong Woo

Hwang, Cheol Seong https://orcid.org/0000-0002-6254-9758
Funding

Funding for this research was provided by:

National Research Foundation of Korea (2020R1A3B2079882)
License Information

Accepted Manuscript valid from 2022-02-11
More Information

SIMILARITY CHECK

: This document is Similarity Check deposited

IDENTIFIERS

: Woohyun Kim (ORCID)

: Jeong Woo Jeon (ResearcherID)

: Cheol Seong Hwang (ORCID)

PEER REVIEW METHOD

: Single-blind

PUBLICATION HISTORY

: Received 14 January 2021; Accepted 8 February 2021; Accepted Manuscript published 11 February 2021; Advance Article published 16 March 2021; Version of Record published 25 March 2021

Document is current