Vass, Máté http://orcid.org/0000-0001-9865-4982
Derzsi, Aranka http://orcid.org/0000-0002-8005-5348
Schulze, Julian http://orcid.org/0000-0001-7929-5734
Donkó, Zoltán http://orcid.org/0000-0003-1369-6150
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (428942393 SFB TR 87 C1)
Nemzeti Kutatási Fejlesztési és Innovációs Hivatal (FK128924 K134462)
Article Title: Intrasheath electron dynamics in low pressure capacitively coupled plasmas
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-12-15
Date Accepted: 2021-02-17
Online publication date: 2021-03-15