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Complete stress release in monolayer ALD-Al<sub>2</sub>O<sub>3</sub> films based on mechanical equilibrium homeostasis to realize a bending radius of 1 mm

Crossref DOI link: https://doi.org/10.1039/D2SM00486K

Published Online: 2022

Update policy: https://doi.org/10.1039/rsc_crossmark_policy

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