Extreme ultraviolet lithography reaches 5 nm resolution
Crossref DOI link: https://doi.org/10.1039/D4NR01332H
Published Online: 2024
Update policy: https://doi.org/10.1039/rsc_crossmark_policy
Giannopoulos, Iason https://orcid.org/0000-0002-5937-2453
Mochi, Iacopo https://orcid.org/0000-0002-7859-8167
Vockenhuber, Michaela
Ekinci, Yasin https://orcid.org/0000-0002-0331-0501
Kazazis, Dimitrios https://orcid.org/0000-0002-2124-2813
Version of Record valid from 2024-08-12
