Realizing Area efficient Silicon Micro Structures Using Only Front End Bulk Micromachining
Crossref DOI link: https://doi.org/10.1007/s12572-015-0145-y
Published Online: 2015-10-01
Published Print: 2015-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Mohanty, Radharamana http://orcid.org/0000-0003-1017-6977
Karthik, Chanda
Vanjari, Siva Rama Krishna
Singh, Shiv Govind
Text and Data Mining valid from 2015-10-01