Acoustic Phonons and Mechanical Properties of Ultra-Thin Porous Low-k Films: A Surface Brillouin Scattering Study
Crossref DOI link: https://doi.org/10.1007/s11664-018-6276-8
Published Online: 2018-04-13
Published Print: 2018-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zizka, J.
King, S.
Every, A.
Sooryakumar, R.
Funding for this research was provided by:
Semiconductor Research Corporation (2012-IN-2296)
License valid from 2018-04-13