Clausen, Anna M.
Paskiewicz, Deborah M.
Sadeghirad, Alireza
Jakes, Joseph
Savage, Donald E.
Stone, Donald S.
Liu, Feng
Lagally, Max G.
Funding for this research was provided by:
DOE (DE-FG02-03ER46028)
NSF MRSEC program
NSF Graduate Research Fellowship
This article is maintained by: Elsevier
Article Title: Silicon nanomembranes as a means to evaluate stress evolution in deposited thin films
Journal Title: Extreme Mechanics Letters
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.eml.2014.12.003
Content Type: article
Copyright: Copyright © 2014 Elsevier Ltd. Published by Elsevier Ltd. All rights reserved.