Ichimura, Takashi
Ren, Yan
Kruit, P.
This article is maintained by: Elsevier
Article Title: A large current scanning electron microscope with MEMS-based multi-beam optics
Journal Title: Microelectronic Engineering
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.mee.2013.07.008
Content Type: article
Copyright: Crown copyright © 2013 Published by Elsevier B.V. All rights reserved.