Cheng, Yi-Lung
Leon, Ka-Wai
Huang, Jun-Fu
Chang, Wei-Yuan
Chang, Yu-Min
Leu, Jihperng
This article is maintained by: Elsevier
Article Title: Effect of moisture on electrical properties and reliability of low dielectric constant materials
Journal Title: Microelectronic Engineering
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.mee.2013.08.018
Content Type: article
Copyright: Crown copyright © 2013 Published by Elsevier B.V. All rights reserved.