Filipovic, Lado
Selberherr, Siegfried
Mutinati, Giorgio C.
Brunet, Elise
Steinhauer, Stephan
Köck, Anton
Teva, Jordi
Kraft, Jochen
Siegert, Jörg
Schrank, Franz
Funding for this research was provided by:
Austrian Research Promotion Agency (FFG)
ENIAC Joint Undertaking
This article is maintained by: Elsevier
Article Title: Methods of simulating thin film deposition using spray pyrolysis techniques
Journal Title: Microelectronic Engineering
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.mee.2013.12.025
Content Type: article
Copyright: Copyright © 2013 Elsevier B.V. All rights reserved.