Frederick, Ryan T.
Saha, Sumit
Trey Diulus, J.
Luo, Feixiang
Amador, Jenn M.
Li, Mengjun
Park, Deok-Hie
Garfunkel, Eric L.
Keszler, Douglas A.
Herman, Gregory S.
Funding for this research was provided by:
U.S. National Science Foundation (ECCS-1542101)
U.S. National Science Foundation (CHE-1606982)
Semiconductor Research Corporation
This article is maintained by: Elsevier
Article Title: Thermal and radiation chemistry of butyltin oxo hydroxo: A model inorganic photoresist
Journal Title: Microelectronic Engineering
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.mee.2018.11.011
Content Type: article
Copyright: © 2018 Elsevier B.V. All rights reserved.