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A flexure-based electromagnetic nanopositioning actuator with predictable and re-configurable open-loop positioning resolution

Crossref DOI link: https://doi.org/10.1016/j.precisioneng.2014.12.006

Published Print: 2015-04

Update policy: https://doi.org/10.1016/elsevier_cm_policy

Authors

Teo, Tat Joo

Yang, Guilin

Chen, I-Ming
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This article is maintained by: Elsevier

Article Title: A flexure-based electromagnetic nanopositioning actuator with predictable and re-configurable open-loop positioning resolution

Journal Title: Precision Engineering

CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.precisioneng.2014.12.006

Content Type: article

Copyright: Copyright © 2015 Elsevier Inc. All rights reserved.