Zhou, Qin
Sussman, Allen
Chang, Jiyoung
Dong, Jeffrey
Zettl, Alex
Mickelson, William
Funding for this research was provided by:
U.S. Department of Energy (DE-AC02-05CH11231)
National Science Foundation (EEC-083819)
This article is maintained by: Elsevier
Article Title: Fast response integrated MEMS microheaters for ultra low power gas detection
Journal Title: Sensors and Actuators A: Physical
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.sna.2014.12.005
Content Type: article
Copyright: Copyright © 2014 Elsevier B.V. All rights reserved.