Lale, Ahmet
Scheid, Emmanuel
Cristiano, Fuccio
Datas, Lucien
Reig, Benjamin
Launay, Jérome
Temple-Boyer, Pierre
Funding for this research was provided by:
French RENATECH
This article is maintained by: Elsevier
Article Title: Study of aluminium oxide thin films deposited by plasma-enhanced atomic layer deposition from tri-methyl-aluminium and dioxygen precursors: Investigation of interfacial and structural properties
Journal Title: Thin Solid Films
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.tsf.2018.09.028
Content Type: article
Copyright: © 2018 Elsevier B.V. All rights reserved.