Uhlén, F.
Nilsson, D.
Rahomäki, J.
Belova, L.
Schroer, C.G.
Seiboth, F.
Holmberg, A.
Hertz, H.M.
Vogt, U.
This article is maintained by: Elsevier
Article Title: Nanofabrication of tungsten zone plates with integrated platinum central stop for hard X-ray applications
Journal Title: Microelectronic Engineering
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.mee.2013.10.011
Content Type: article
Copyright: Copyright © 2013 Elsevier B.V. All rights reserved.