Govindarajan, R.
Keswani, M.
Raghavan, S.
Funding for this research was provided by:
SRC/Sematech Engineering Research Center for Environmentally Benign Semiconductor Manufacturing at The University of Arizona (425.028)
This article is maintained by: Elsevier
Article Title: Galvanic corrosion characteristics of poly silicon–tantalum nitride couple immersed in dilute HF solutions
Journal Title: Materials Science in Semiconductor Processing
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.mssp.2014.07.010
Content Type: article
Copyright: Copyright © 2014 Elsevier Ltd. All rights reserved.