Mattinen, Miika
King, Peter J.
Khriachtchev, Leonid http://orcid.org/0000-0002-1146-5212
Heikkilä, Mikko J.
Fleming, Ben
Rushworth, Simon
Mizohata, Kenichiro
Meinander, Kristoffer
Räisänen, Jyrki
Ritala, Mikko http://orcid.org/0000-0002-6210-2980
Leskelä, Markku
Funding for this research was provided by:
Academy of Finland
ASM Microchemistry
This article is maintained by: Elsevier
Article Title: Atomic layer deposition of crystalline molybdenum oxide thin films and phase control by post-deposition annealing
Journal Title: Materials Today Chemistry
CrossRef DOI link to publisher maintained version: https://doi.org/10.1016/j.mtchem.2018.04.005
Content Type: article
Copyright: © 2018 The Authors. Published by Elsevier Ltd.