On the nucleation of PdSi and NiSi2 during the ternary Ni(Pd)/Si(100) reaction
Crossref DOI link: https://doi.org/10.1063/1.4818333
Published Online: 2013-08-13
Published Print: 2013-08-14
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Schrauwen, A.
Demeulemeester, J.
Kumar, A.
Vandervorst, W.
Comrie, C. M.
Detavernier, C.
Temst, K.
Vantomme, A.