Rapid measurement of substrate temperatures by frequency-domain low-coherence interferometry
Crossref DOI link: https://doi.org/10.1063/1.4827426
Published Online: 2013-10-29
Published Print: 2013-10-28
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Tsutsumi, Takayoshi
Ohta, Takayuki
Ishikawa, Kenji
Takeda, Keigo
Kondo, Hiroki
Sekine, Makoto
Hori, Masaru
Ito, Masafumi