Hybrid model of atmospheric pressure Ar/O2/TiCl4 radio-frequency capacitive discharge for TiO2 deposition
Crossref DOI link: https://doi.org/10.1063/1.4876062
Published Online: 2014-05-12
Published Print: 2014-05-14
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Leblanc, A.
Ding, Ke
Lieberman, M. A.
Wang, De Xin
Zhang, Jing
Jun Shi, Jian
Funding for this research was provided by:
DOE (DE-SC000193)