Effects of plasma and vacuum-ultraviolet exposure on the mechanical properties of low-k porous organosilicate glass
Crossref DOI link: https://doi.org/10.1063/1.4891501
Published Online: 2014-07-29
Published Print: 2014-07-28
Update policy: https://doi.org/10.1063/aip-crossmark-policy-page
Guo, X.
Jakes, J. E.
Banna, S.
Nishi, Y.
Shohet, J. L.