Chen, Xuying
Liu, Xinxin
Wang, Tao
Le, Xianhao
Ma, Fangyi
Lee, Chengkuo http://orcid.org/0000-0002-8886-3649
Xie, Jin http://orcid.org/0000-0003-3942-3046
Funding for this research was provided by:
National Natural Science Foundation of China (51475423)
Science Fund for Creative Research Groups of National Natural Science Foundation of China (51521064)
Fundamental Research Funds for the Central Universities
Journal title: Journal of Micromechanics and Microengineering
Article type: note
Article title: Piezoelectric micromachined ultrasonic transducers with low thermoelastic dissipation and high quality factor
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2017-12-01
Date accepted: 2018-02-23
Online publication date: 2018-03-13